What is SIMS?
Secondary ion mass spectrometry (SIMS)
Introduction: Secondary Ion Mass Spectrometry (SIMS) is an analytical technique used to image (2D and 3D) the chemical composition of solid surfaces. The techique ultilizes ion beams to physically bombard the surface of materials. The impact of the primary ions causes the ejection of secondary ions, neutral particles, and electrons from the surface of the material. The secondary ions are extracted into a mass analyzer, where they are separated by there mass-to-charge ratio. The resulting mass spectrum provides elemental, molecular, and isotopic information of the material. Ion images, where a mass spectra is obtained at every pixel, reveal the distribution of the surface chemicals. Depth profiling and 3D ion images are aquired by sequentially sputtering away analyzed material and collecting information as a function of depth.
Application: SIMS can be used to analyze a wide range of materials, including semiconductors, metals, ceramics, polymers, and biological samples. The techniques high surface sensitivity makes it a powerful tool for investigating the distribution of trace elements, dopants, and impurities. SIMS has many applications, including in the semiconductor industry for quality control and process development, in material science for analyzing surface composition and structure, and in biology and pharmacuticals for analyzing tissue and cellular samples and identifying biomolecules.